单向重复性(触针*最大平均值2) LF 0.35 µm (0.000014 in) SF / EM1 / EM2 0.35 µm (0.000014 in) MF 0.50 µm (0.00002 in) EF 0.65 µm (0.000026 in) 6 W 0.80 µm (0.000032 in) 预行程变化 LF ±0.60 µm (±0.000023 in) SF / EM1 / EM2 ±0.80 µm (±0.000032 in) MF ±1.00 µm (±0.000039 in) EF ±2.00 µm (±0.000079 in) 6 W ±1.50 µm (±0.000058 in) Weight (probe and module) 22 g (0.8 oz) 触发力xy平面z轴 LF 0.055 N 0.65 N SF / EM1 / EM2 0.08 N 0.75 N MF 0.1 N 1.9 N EF 0.1 N 3.2 N 6 W 0.14 N 1.6 N 超程力xy平面z轴 LF 0.09 N 1.15 N SF / EM1 / EM2 0.2-0.3 N 3.5 N MF 0.2-0.4 N 7.0 N EF 0.2-0.5 N 10.0 N 6 W 0.25 N 2.5 N